Units

Silicon Nitride

Silicon Carbide

Grade

RBSN

SSN

RBSC

SSC

Macor

Shapal - M

Nominal Composition

Si3N4

Si3N4

SiSiC

SSiC

Density

g/cm3

2.50

3.25

3.10

3.12

2.52

2.9

Mechanical Properties :

Flexural Strength 20°C

MPa

190

690

400

410

94

300

800°C

MPa

190

450

400

410

Compressive Strength

MPa

550

2000

2000

2000

345

1200

Modulus of Elasticity

GPa

170

290

390

450

66.9

190

Poisson's Ratio

0.27

0.24

0.24

0.17

0.29

0.31

Hardness

Hv0.3

1100

1500

3000

2800

230

390

Fracture Toughness (K1c)

MPa1/2

3.0

8.0

4.0

4.0

1.53

Thermal Properties :

Max. Use Temp.

°C

1150

1150

1350

1400

800

1000

Thermal Expansion Coeff.

x10 -6/°C

3

3

3

3

9.3

4.4

Thermal Conductivity

W/mK

16

25

150

100

1.46

90

Thermal Shock Resistance

°C

600

600

400

380

400

Specific Heat Capacity

J/kgK

800

800

1100

1000

790

480

Electrical Properties :

Resistivity 25°C

Ohm.cm

1010

1011

10

100